新一代AI+高端光学仪器

任务目标与背景
研究方向
研究基础

任务目标

积极相应复旦新工科建设任务及目标，组建涵盖教学、科研、产业及工程应用的完整梯队。本团队以开发新一代AI+高端光学仪器为目标，攻克以下技术难点：1）高性能检测光学系统从设计、加工、集成、装调全链条工艺；2）精密运动系统精密控制包括误差建模、辨识、显著性因素分析、优化到硬件制造技术；3）基于深度机器学习的缺陷检测、面形误差评估、误差补偿等核心算法；4）仪器整机系统的研制和稳定性控制。新一代AI+高端光学检测仪器的研制，将为我国高端制造增加核心竞争力，可应用于包括集成电路先进工艺制程领域，助力光刻机先进工艺制程领域发展，进而有效提升复旦大学新工科技术力量和领域影响力。

背景

高端装备是国家十五五规划重点内容，尤其是先进光学检测，包括集成电路领域的晶圆缺陷检测、芯片检测、复杂光学元器件检测等，核心技术长期受制于国外尤其是欧美国家；近年来中美贸易关系的严峻形势，加剧了在高端检测领域的技术封锁。同时，人工智能（AI）的爆发，并不断渗透各个领域，包括高端光学检测技术尤其是芯片领域的超精密检测，例如，科磊（KLA）公司的高端芯片缺陷检测系统，就依赖其数据库和深度机器学习算法，使其长期霸占国际市场主导地位，成为我国当前的“卡脖子”技术。为突破核心技术壁垒，摆脱进口依赖，研发我国具有独立知识产权的高端光学检测仪器势在必行。

研究方向

先进光学检测技术与系统，集光学理论、精密加工、检测技术和仪器开发为一体

研究基础

本团队人员涵盖一线教学、科研、工程师、科研助理、项目管理等，以工程中心为平台，以智能数控超精密光学加工工艺为主，兼备先进光学检测技术与系统，是集光学理论、精密加工、检测技术和仪器开发为一体的超精密制造和检测研究中心。

团队成员

孔令豹研究员

智能光学制造及智能视觉系统；光学超精密加工全程工艺及优化；

张志平副研究员

超精密光电检测技术研究及产品开发

徐敏研究员

智能光学超精密制造与检测；热成像光学；

王施相副教授

智能制造；多尺度自由曲面智能检测；

韩伟青年研究员

电化学加工；激光增材制造；原子及近原子尺度制造；

科研项目

项目名称	项目类型	负责人	执行年限
微光学元件表面形貌与光学性能映射关系研究微光学元件表面形貌与光学性能映射关系研究国家重点研发计划 2025.12-2028.11 负责人：孔令豹项目介绍	国家重点研发计划	孔令豹	2025.12-2028.11
大面积微结构跨尺度测量和高精度表征方法与系统大面积微结构跨尺度测量和高精度表征方法与系统国家重点研发计划 2025.12-2028.11 负责人：王施相项目介绍	国家重点研发计划	王施相	2025.12-2028.11
带高反光抑制功能的高速高精度激光三维扫描相机技术带高反光抑制功能的高速高精度激光三维扫描相机技术横向 2025.11-2028.12 负责人：孔令豹项目介绍	横向	孔令豹	2025.11-2028.12
2025年“长光-复旦合作基金”揭榜挂帅项目 2025年“长光-复旦合作基金”揭榜挂帅项目单位内部自主研发项目 2025.11-2027.10 负责人：韩伟项目介绍	单位内部自主研发项目	韩伟	2025.11-2027.10
光路自动化调节最小系统光路自动化调节最小系统横向 2025.4-2025.5 负责人：张志平项目介绍	横向	张志平	2025.4-2025.5
高保真大角度近眼显示技术高保真大角度近眼显示技术横向 2024.9-2027.3 负责人：孔令豹项目介绍	横向	孔令豹	2024.9-2027.3
基于暗场散射光飞行时间的微纳缺陷精准检测机理研究基于暗场散射光飞行时间的微纳缺陷精准检测机理研究国家自然科学基金 2024.1-2027.12 负责人：孔令豹项目介绍	国家自然科学基金	孔令豹	2024.1-2027.12
轮廓测量技术与装置研发轮廓测量技术与装置研发国家重点研发计划 2023.1-2025.12 负责人：徐敏项目介绍	国家重点研发计划	徐敏	2023.1-2025.12
多尺度光学自由曲面的六自由度多传感器集成原位检测技术研究多尺度光学自由曲面的六自由度多传感器集成原位检测技术研究国家自然科学基金 2023.1-2025.12 负责人：王施相项目介绍	国家自然科学基金	王施相	2023.1-2025.12
大口径复杂曲面全频段误差与损伤原位检测技术研究大口径复杂曲面全频段误差与损伤原位检测技术研究国家重点研发计划 2022.12-2025.11 负责人：孔令豹项目介绍	国家重点研发计划	孔令豹	2022.12-2025.11

科研发表

期刊论文
会议论文
著作

论文标题	发表期刊	第一/通讯作者	发表年份
Multi-Color Channel Gamma Correction in Fringe Projection Profilometry Multi-Color Channel Gamma Correction in Fringe Projection Profilometry Kong,Lingbao PHOTONICS 摘要	PHOTONICS	Kong,Lingbao	2025
Laser powder bed fusion of SiO2/AlSi10Mg composite material Laser powder bed fusion of SiO2/AlSi10Mg composite material Han,Wei、Kong,Lingbao CERAMICS INTERNATIONAL 摘要	CERAMICS INTERNATIONAL	Han,Wei、Kong,Lingbao	2025
Extrinsic parameters optimization for fringe projection system based on standard components Extrinsic parameters optimization for fringe projection system based on standard components Kong,Lingbao MEASUREMENT 摘要	MEASUREMENT	Kong,Lingbao	2025
Numerical modelling and analysis for radial error motion of 5-DOF aerostaticbearing spindles under the unbalanced electromagnetic force Numerical modelling and analysis for radial error motion of 5-DOF aerostaticbearing spindles under the unbalanced electromagnetic force Xu,Min MEASUREMENT 摘要	MEASUREMENT	Xu,Min	2025
Adaptive specular reflection removal in light field microscopy using multipolarization hybrid illumination and deep learning Adaptive specular reflection removal in light field microscopy using multipolarization hybrid illumination and deep learning Kong,Lingbao OPTICS AND LASERSIN ENGINEERING 摘要	OPTICS AND LASERSIN ENGINEERING	Kong,Lingbao	2025
High quality diameter-variable hollow annular beam generated by two round-tip axicons High quality diameter-variable hollow annular beam generated by two round-tip axicons Kong,Lingbao OPTICS COMMUNICATIONS 摘要	OPTICS COMMUNICATIONS	Kong,Lingbao	2025
High quality diameter-variable hollow annular beam generated by two round-tip axicons High quality diameter-variable hollow annular beam generated by two round-tip axicons Kong,Lingbao OPTICS COMMUNICATIONS 摘要	OPTICS COMMUNICATIONS	Kong,Lingbao	2025
Dynamic behavior and defect control in LPBF of quartz glass: Insights from VOF model simulations Dynamic behavior and defect control in LPBF of quartz glass: Insights from VOF model simulations Han,Wei、Kong,Lingbao POWDER TECHNOLOGY 摘要	POWDER TECHNOLOGY	Han,Wei、Kong,Lingbao	2025
Design and Calibration of a Slit Light Source for Infrared Deflectometr Design and Calibration of a Slit Light Source for Infrared Deflectometr Xu,Min SENSORS 摘要	SENSORS	Xu,Min	2025
Large-Area Surface Measurement of Spherical Parts Based on Interferometry Large-Area Surface Measurement of Spherical Parts Based on Interferometry Xu,Min IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT 摘要	IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT	Xu,Min	2025
Advances in subsurface defect detection techniques for fused silica optical components: A literature review Advances in subsurface defect detection techniques for fused silica optical components: A literature review Kong,Lingbao JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T 摘要	JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T	Kong,Lingbao	2025
Structure, stability and electronic properties of two-dimensional monolayer noble metals with triangular lattices: Cu, Ag, and Au Structure, stability and electronic properties of two-dimensional monolayer noble metals with triangular lattices: Cu, Ag, and Au Kong,Lingbao PHYSICAL CHEMISTRY CHEMICAL PHYSICS 摘要	PHYSICAL CHEMISTRY CHEMICAL PHYSICS	Kong,Lingbao	2025
A precision method for measuring largediameter, highgradient surface profiles using a chromatic confocal sensor and mirror assembly A precision method for measuring largediameter, highgradient surface profiles using a chromatic confocal sensor and mirror assembly Xu,Min MEASUREMENT SCIENCE AND TECHNOLOGY 摘要	MEASUREMENT SCIENCE AND TECHNOLOGY	Xu,Min	2025
Efficient 3D measurement method based on an array chromatic confocal technique Efficient 3D measurement method based on an array chromatic confocal technique Kong,Lingbao OPTICS LETTERS 摘要	OPTICS LETTERS	Kong,Lingbao	2025
Modeling and analysis of measurement error for a four-axis optical profilometer Modeling and analysis of measurement error for a four-axis optical profilometer Xu,Min OPTICS EXPRESS 摘要	OPTICS EXPRESS	Xu,Min	2025
Design of a widefield wavelengthcoded depthsensing objective Design of a widefield wavelengthcoded depthsensing objective Kong,Lingbao APPLIED OPTICS 摘要	APPLIED OPTICS	Kong,Lingbao	2025
Gaussian mixture model based invalid point removal for fringe projection profilometry Gaussian mixture model based invalid point removal for fringe projection profilometry Kong,Lingbao OPTICS AND LASER TECHNOLOGY 摘要	OPTICS AND LASER TECHNOLOGY	Kong,Lingbao	2025
Fabrication of on-chip singlecrystal lithium niobate waveguide microstructures based on maskchemical mechanical polishing technology Fabrication of on-chip singlecrystal lithium niobate waveguide microstructures based on maskchemical mechanical polishing technology Xu,Min OPTICS AND LASER TECHNOLOGY 摘要	OPTICS AND LASER TECHNOLOGY	Xu,Min	2025
MagScanner: A Magnetic Planar XY Stage for the Scanning ProbeBased Surface Profilometer MagScanner: A Magnetic Planar XY Stage for the Scanning ProbeBased Surface Profilometer Kong,Lingbao IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING 摘要	IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING	Kong,Lingbao	2025
An LED Strobe Scanning System for Enhanced Measurement Accuracy, Flexibility, and Noise Reduction An LED Strobe Scanning System for Enhanced Measurement Accuracy, Flexibility, and Noise Reduction Kong,Lingbao、Xu,Min IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT 摘要	IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT	Kong,Lingbao、Xu,Min	2025
A high-precision binocular 3D reconstruction system based on depth-of-field extension and feature point guidance A high-precision binocular 3D reconstruction system based on depth-of-field extension and feature point guidance Kong,Lingbao、Xu,Min MEASUREMENT 摘要	MEASUREMENT	Kong,Lingbao、Xu,Min	2025
Enhanced ShackHartmann wavefront sensor with propagation correction for freeform mirror measurement Enhanced ShackHartmann wavefront sensor with propagation correction for freeform mirror measurement Wang,Shixian g OPTICS LETTERS 摘要	OPTICS LETTERS	Wang,Shixian g	2025
A Multiconditional PrandtlIshlinskii model for nonlinearity compensation on the longitudinalshear piezoelectric A Multiconditional PrandtlIshlinskii model for nonlinearity compensation on the longitudinalshear piezoelectric Zhang,Zhiping MECHANICAL SYSTEMS AND SIGNAL PROCESSING 摘要	MECHANICAL SYSTEMS AND SIGNAL PROCESSING	Zhang,Zhiping	2025
Measurement and Characterization of Micro CornerCube Reflectors Array Using Coherent Denoising Interference and Physical ModelBased Neural Network Measurement and Characterization of Micro CornerCube Reflectors Array Using Coherent Denoising Interference and Physical ModelBased Neural Network Kong,Lingbao CHINESE JOURNAL OF MECHANICAL ENGI NEERING 摘要	CHINESE JOURNAL OF MECHANICAL ENGI NEERING	Kong,Lingbao	2025
Extended axial response range of non-patterned wafer dark-field inspection systems via dualtailed extendedaxial point spread functions Extended axial response range of non-patterned wafer dark-field inspection systems via dualtailed extendedaxial point spread functions Kong,Lingbao、Xu,Min OPTICS AND LASER TECHNOLOGY 摘要	OPTICS AND LASER TECHNOLOGY	Kong,Lingbao、Xu,Min	2025
A Low-Distortion Voltage Control Strategy Based on Digital ΔΣ PWMP-PI for VoltageSource Inverters A Low-Distortion Voltage Control Strategy Based on Digital ΔΣ PWMP-PI for VoltageSource Inverters Zhang,Zhiping IEEE TRANSACTIONS ON TRANSPORTATION ELECTRIFICATION 摘要	IEEE TRANSACTIONS ON TRANSPORTATION ELECTRIFICATION	Zhang,Zhiping	2025
Self-Powered MoSSe/MoSe2 AlloyHeterojunction Photodetector via Interface Engineering for Dual-Function Imaging and Cryptographic Data Transmission Self-Powered MoSSe/MoSe2 AlloyHeterojunction Photodetector via Interface Engineering for Dual-Function Imaging and Cryptographic Data Transmission Zhang,Zhiping LASER & PHOTONICS REVIEWS 摘要	LASER & PHOTONICS REVIEWS	Zhang,Zhiping	2025
Modulation of multidimensional interfacial effects in different stacking Bi2Se3/WS2 heterojunctions Modulation of multidimensional interfacial effects in different stacking Bi2Se3/WS2 heterojunctions Zhang,Zhiping APPLIED SURFACE SCIENCE 摘要	APPLIED SURFACE SCIENCE	Zhang,Zhiping	2025

论文标题	发表期刊	第一/通讯作者	发表年份
Advances in Optical Me asurement of Complex Freeform and Structured Components Advances in Optical Me asurement of Complex Freeform and Structured Components Kong,Lingbao the 19th China-Japan International Conference on Ultra-Precision Machining Process 2025(CJUMP 2025) 摘要	the 19th China-Japan International Conference on Ultra-Precision Machining Process 2025(CJUMP 2025)	Kong,Lingbao	2025

论文标题	发表期刊	第一/通讯作者	发表年份
现代光学设计及应用现代光学设计及应用孔令豹化学工业出版社摘要	化学工业出版社	孔令豹	2025

人才培养

招生信息
科创项目

招生类型：工程管理

专业名称及代码：

工程管理（125601）
工业工程与管理‌（125603）

招生类型：学术型研究生（硕/博）

专业名称及代码：

光学工程（080300）

招生类型：专业型研究生（硕/博）

专业名称及代码：

电子信息（085400）